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Series ZZS Box-type Vacuum Coating Machine
  • Uses and features
  • Specification parameter
    Brief introduction

    After near 40 years of development,ZZS box-type vacuum coating machine by Rankuum Machinery has formed into a series with size of the vacuum coating chamber varying from 500mm to 3,600mm,and presently,an ideal series for coating of multi-layer optical and electrical thin-films that is widely used in scientific research or mass production by enterprises,research institutions,colleges and tertiary institutions.

    Product features

    This product has a box-type structure and rear-mounted vacuum system for convenience of operation and maintenance as well as a flattened surface for convenience of cleaning,thus especially suitable for installation in the wall of a clean room.

    The vacuum system is characterized as high in pumping speed and vacuum degree and short in pumping time and production period.

    A tubular heating element is employed for equal baking,an element with a long service time capable to render a maximum temperature of 350℃ and a homogeneity of 270℃±10℃.

    Workpiece rotation,driven by the upper center and provided with water-cooling for the bearing strip and sealing with magnetic fluid,is smooth and reliable.

    A controller on depth of quartz crystal films is employed to realize automatic control throughout the coating procedure.

    The advanced coating control system with a nice and practical human-machine interface is stable and reliable,allowing manual,semi-automatic and full automatic operation.


    Scope of application

    This machine is applicable to production of IR-CUT filter plate,color separation filter,high-reflection film,AR film,long-wave pass,short-wave pass and various kinds of electrical film.

    Standard configurations for common use

    Specified in the following table are configurations and indices of our five standard models commonly used.Over years,our company has developed series of box-type vacuum coating machine sized at  350mm,450mm,500mm,550mm,630mm,700mm,800mm,900mm,1100mm,1,250mm,1,300mm,1,500mm,1,800mm,2,200mm and 2,500mm,3,600mm.Furthermore,our company can,upon request of vast customers,provide customized manufacturing of vacuum coating machine of various forms,including special customization of vacuum chamber size,vacuum system configuration,work holder system,workpiece baking system,monitoring system on film depth,evaporation system,inflation system,ion source system and electrical control system.
    ZZS系列箱式真空镀膜机
    Series ZZS Box-type Vacuum Coating Machine

    常用标准配置表
    Standard configurations for common use
    型  号
    Model
    ZZS600 ZZS700 ZZS800 ZZS900 ZZS1100 ZZS1300 ZZS1800
    真空室尺寸(直径×高)
    Size of the vacuum chamber (diameter× height)
    Φ600×750 Φ710×850 Φ800×900 Φ900×1000 Φ1100×1300 Φ1300×1300 Φ1800×2000
    极限真空度
    Ultimate vacuum degree
    ≤3.0×10-4Pa
    恢复真空时间
    Time for vacuum recovery
    4.0×10-3Pa≤15min
    抽气系统
    Pumping system
    扩散泵 Diffusion pump K-400 TK-500 K-600 K-630 TK-500×2 K-630×2 K-800×2
    罗茨泵 Roots pump ZJP-150 ZJP-300 ZJP-300 ZJP-1200
    机械泵 Mechanical pump 2X-30 2X-70 2X-70 2X-70 2X-70 2X-70 2X-70,H-150×2
    真空测量系统
    Vacuum measuring system
    配三路数字复合真空计,两路低真空,一路高真空
    Three-way digital compound vacuum gauge,two ways of low vacuum and one of high vacuum
    操作方式
    Operation mode
    手动/自动
    Manual/automatic
    工件夹具
    Work piece holder
    Φ600 Φ640 Φ750 Φ840 Φ1040 Φ1240 Φ1720
    工件烘烤系统
    Work piece baking system
    上烘烤,铠装管状加热器加热,******温度350℃,PID自动控温及显示
    Up baking;heated by sheathed tubular heating element;maximum temperature 350℃;PID automatic temperature control and display.
    蒸发源
    Evaporation source
    电阻蒸发源
    Resistance evaporation source
    电阻蒸发源功率4KW(8V、600A)
    Power of the resistance evaporation source: 4KW (8V,600A)
    电子束蒸发源
    Electron beam evaporation source
    E型电子束蒸发源,功率6~10KW
    Power of E-type electron beam evaporation source: 6-10KW
    膜厚监控系统
    Monitoring system on depth of films
    光学膜厚监控,波长范围380-800nm,9透反射光路,六位电动比较片带显示;石英晶体膜厚监控,美国SQC-310、IC/6
    The optical film thickness monitor,a wavelength range of 380-800nm,9transflective optical path,six electric comparison sheet with display;quartz crystal thickness monitoring,the United States SQC-310,IC / 6
    充气系统 charge systems 自动压强仪2~510-2Pa
    Automatic pressure instrument
    质量流量计:单路单显,双路双显
    Mass flow meter: one way one display,dual way dual display
    离子辅助(选配)
    Ion-assisted (optional)
    H6霍尔离子源、H10霍尔离子源、Φ12cm考夫曼离子源、Φ16cm考夫曼离子源
    H6 Hall ion source,H10 Hall ion source,Φ12cm Kaufman ion source,Φ16cm Kaufman ion source
    深冷捕集器(选配)
    Cryogenic trap (optional)
    国产12P、国产15P、进口POLYCOLD550、进口POLYCOLD670
    Domestic 12P,15P,POLYCOLD 550,POLYCOLD 670

    动力需求
    Power demand
    冷却水
    Cooling water
    压力温度
    Pressure and temperature
    压力:0.25~0.35MPa;温度≤25℃
    Pressure: 0.25-0.35MPa;temperature ≤25℃
    流量
    Flow rate
    ≥50L/min ≥60L/min ≥80L/min ≥100L/min ≥140L/min ≥160L/min ≥180L/min
    压缩空气
    Compressed air
    压力:0.5~0.7MPa
    Pressure: 0.5-0.7MPa
    ******消耗电力
    Maximum power consumption
    ~25KW ~35KW ~40KW ~45KW ~50KW ~60KW ~120KW
    设备外形尺寸(宽×深×高)
    Overall dimension (width×depth×height)
    2100×1800×2000 3350×2600×2370 3580×3000×2450 3870×3600×2670 3870×3600×2670 3900×4050×2950 4400×4000×3600
    设备总重(KG)
    Gross weight (Kg)
    约1500
    About 1,500
    约2000
    About 2,000
    约2500
    About 2,500
    约3000
    About 3,000
    约3000
    About 3,000
    约4000
    About 4,000
    约6000
    About 4,000